DRAM Analysis
Understanding the process technology in a DRAM device requires a specialized focus on features relevant to their manufacture. The DRAM Process Review delivers that analysis by providing an overview of the general structure and by focusing on the capacitors and logic between the memory blocks.
These reports contain the following detailed information:
- Introduction and major findings
- SEM and TEM analysis of the general structure
- Memory cell cross-sectional TEM analysis
- Memory cell planar TEM analysis
- Plan view analysis of the memory logic, such as sense amplifiers and word line drivers
- Dopant analysis