Process Flow Analysis
Chipworks' process flow analysis is a valuable addition to a standard process analysis. Using images directly from the structural report, plus additional microscopy required for accurate analysis, the sequence is described in point form, with a discussion of the process steps for each mask step. Normally ordered alongside the related process report, it may also be purchased as a stand-alone report. PFA reports are most commonly available on memory devices and image sensors, but are also available for other device types.
Report contents include:
- Basic device overview
- Evidenced-based discussion of process mask sequence, beginning at the substrate and taken stepwise through the layers
- Summary mask count including the minimum critical dimension for each mask