MEMS Architectural Analysis (ICWorks Surveyor)
Architectural analysis is the study of the topology of a MEMS device, to understand how the physical design impacts the specification. Additionally, when combined with process analysis, it is used to build simulations of competing designs.
ICWorks Surveyor gives the capability of a high performance SEM on the user's desktop by bringing together an image mosiac of thousands of images with annotation and ruler tools.
ICWorks Surveyor clients use it to measure key structures such as capacitor plates, proof masses, springs, etc.
ICWorks Surveyor Datasheet»