MEMS Process Review – Full
Microelectromechanical systems technology has produced an extensive class of semiconductor devices. The unique process technology incorporated into a MEMS device is the focus of Chipworks' detailed MEMS process review. The MEMS structures are investigated in plan view and in cross section; the control ASIC is also covered.
Report contents include:
- Control ASIC fundamentals – such as general process SEM images, minimum metal pitch, and gate length
- MEMS structure – including a detailed process analysis of the bond pads, dielectrics, metallization, via and contacts, transistors and poly, and wells and substrate
- In-depth examination of the MEMS architecture and electromechanical components such as electrodes, proof mass, control springs, and motion stops
