CMOS Logic Front End (FEOL) Analysis
This report provides a TEM-based analysis of the front end of line (FEOL) fabrication for CMOS technologies. This focused analysis delivers SEM and TEM analysis of isolation, MOS transistors, and PMD.
Report contents include the following detailed information:
- TEM Analysis of the FEOL, including logic MOS transistors, PMD (metal 0, if present, but not metal 1 details).
- Selected materials analysis results
- Critical dimensions
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