Chipworks

Imager Process Review Reports (IPR): Know where your competition is headed.

Chipworks' Imager Process Review Reports are an extension of our Process Review Reports and provide additional details about the unique fabrication processes that enable CMOS image sensor and charge coupled device (CCD) technology. Using custom-developed and refined sample preparation techniques, we provide details on the specific processes used in image sensors - including microlens and color filter analysis, unit pixel architecture and photocathode doping profiles.

Report Contents:

Overview of the parent product, reported image sensor specifications and a summary of the major findings.

Die photograph with detailed plan view optical images - which captures the color filter layout and unique die features.

Process analysis and supporting SEM images of the general process structure, dielectrics, metallization, vias and contacts, and transistors and poly. The isolation, wells and substrate complete the process analysis section.

Pixel Array Analysis

This is a key section of our Imager Process Review Reports and includes a schematic of the unit pixels - or shared pixels if applicable. A plan view analysis shows a unit pixel at the microlens level, and is then deprocessed to the metal and poly levels, and finally down to the silicon surface to show the diffusions. Plan view SCM is included to show the size and dopant type the photo site.

We provide a thorough cross sectional analyses of the pixel - parallel and perpendicular to the column outline - to show the structure of the pixel array elements. These detailed images focus on the aperture, transistor gate structure, anti-reflective coatings and photocathode. The cross-sectional analysis is also supplemented by TEM to highlight the gate oxide thicknesses, transistor gate structure and back-end processing in the pixel array. SCM and SRP analysis of the doping profiles in the pixel array, along with circuit analysis of image sensors including the circuitry from the pixel to the ADC, is also included.

An Imager Process Review Report is a complete analysis package that will help you better understand your competitor's image sensor process roadmap.

Resources and Related Information

Imager Process Review Sample Report