MEMS Process Review

MEMS Process Review Reports (MPR): Which way to go?

Micoelectromechanical systems technology has produced an extensive class of semiconductor devices, and the unique process technology incorporated into a MEMS device is the focus of Chipworks' detailed MEMS Process Review Report. The MEMS structures are investigated in plan view and in cross section.

MEMS device fabrication varies considerably from one manufacturer to another and a Chipworks' analysis will highlight these differences, beginning with an overview of both the Control ASIC and the MEMS Structure. Our unique ability to delineate the organic and low-k dielectrics layers now being used in many MEMS devices and advanced technology nodes give you superior insight into how the latest devices function.

Report Contents:

• Control ASIC fundamentals - such as general process SEM images, minimum metal pitch and gate length.
• MEMS Structure - including a detailed process analysis of the bond pads, dielectrics, metallization, via and contacts, transistors and poly, and wells and substrate.
• In-depth examination of the MEMS architecture and electromechanical components such as electrodes, proof mass, control springs and motion stops.

The MEMS technology sector is growing in popularity and Chipworks can conduct a circuit analysis of a MEMS control ASIC to identify which processes offer the best performance. A MEMS report provides you with a comprehensive understanding of competitive device structures and feature sets so that you can build this knowledge into your own product design.

Resources and Related Information

MEMS Process Review Report Overview