Process Flow Analysis
Process Flow Analysis Report (PFA): Fabrication process intelligence.
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Chipworks' Process Flow Analysis is a valuable addition to a standard process analysis. Using images directly from the structural report plus additional microscopy required for accurate analysis, the sequence is described point-form with a discussion of the process steps for each mask step. Normally ordered alongside the related process report, it may also be purchased as a stand-alone report. PFA reports are most commonly available on memory devices and image sensors but are also available for other device types.
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Report Contents:
- Basic device overview.
- Evidenced-based discussion of process mask sequence beginning at the substrate and taken stepwise through the layers.
- Summary mask count including the minimum critical dimension for each mask.
Resources and Related Information
Process Flow Analysis Report Overview
Available Process Flow Analysis Reports